VISS

Vertical Coating System

The VISS400 and VISS600 are modular systems for vertical coating processes. They are ideal if you want to scale your laboratory applications to production level.

Both platforms are available as an inline version with one end or as a through-feed version for continuous processes. Depending on the model, they can be scaled for substrate widths of 400 mm or up to 600 mm. The substrates are transported using a carrier system that is tilted vertically by seven degrees. The system can be loaded and unloaded without touching the front side of the substrates.

This system concept allows for cost-efficient coating of large substrates. Together with the vertical substrate transport, this enables a particle-free coating process, qualifying the VISS systems for use in the semiconductor industry—especially for applications such as advanced packaging, power electronics, and piezo sensors.

Would you like to learn more? Explore the content below or contact us.