Semiconductors
Vacuum Deposition Equipment & Solutions

The semiconductor industry is evolving at remarkable speed, with new technologies bringing highly specialized requirements that demand flexible, customer‑focused solutions.

As core drivers of technological innovation—from single‑digit‑nanometer nodes to emerging materials and process concepts—semiconductors rely on equipment that can keep pace with this rapid progress.

VON ARDENNE provides design, engineering, manufacturing, commissioning, and service for advanced deposition equipment and components tailored to these needs.

Our long‑standing expertise in vacuum technology and thin‑film deposition, combined with a strong global network, enables us to deliver outstanding project execution for our customers.

Would you like to learn more? Explore the content below or contact us.

Excellent implementation of new requirements

with a highly experienced team

Customer oriented and flexible

in platform & component development of special technology topics

Cooperation based on partnership

in the long-term project implementation

FAQ

High-precision vacuum deposition equipment, custom engineering, manufacturing, commissioning, and lifecycle service for wafer and panel applications. 

Magnetron sputtering, electron-beam evaporation, thermal evaporation, laser-arc evaporation, and related pretreatment and in-process measurement systems. 

Yes. We tailor platforms and components to specific materials, throughput, and line-integration needs, using a configure-to-order model to accelerate time to value. 

Advanced packaging, MEMS, and PiezoMEMS today, with broader coverage across front-end and back-end semiconductor use cases.

Applications
Electronic component on printed circuit board
Advanced PackagingVacuum Deposition Equipment for Wafer or Panel-Level SubstratesLearn more
MEMS element on luminous background
MEMSVacuum Deposition Equipment & Solutions for MEMS ManufacturingLearn more
PiezoMEMSAdvanced Vacuum Deposition Equipment for MetallizationLearn more
CLEANROOM
VA CLEANROOM
Sampling & Assembly Facility

for precision optics, photonics & semiconductor application

  • Production of vacuum coating systems for precision optics, photonic systems and semiconductor applications 
  • Sampling & Pilot Deposition Services 
  • 600 qm Semiconductor Cleanroom including AMC capability 
Support

Engineering
Simulation . Sampling . Layout

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Perspective view of a VON ARDENNE sampling and testing equipment.

Technology & Application Center
Sampling . Development . Scaling

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Service
Customer Portal . Spare Parts . Trainings

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CONTACT
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