Semiconductors
Vacuum Deposition Equipment & Solutions

The semiconductor industry is advancing at extraordinary speed, with new technologies introducing highly specialized requirements that call for flexible, customer‑focused solutions.

As key enablers of technological progress—from single‑digit‑nanometer nodes to emerging materials and novel process concepts—semiconductors depend on equipment capable of keeping pace with this rapid evolution.

VON ARDENNE delivers design, engineering, manufacturing, commissioning, and service for advanced deposition equipment and components tailored to these demands.

Our deep expertise in vacuum technology and thin‑film deposition, supported by a strong global network, ensures exceptional project execution and reliable performance for our customers.

Would you like to learn more? Explore the content below or contact us.

Excellent implementation of new requirements

with a highly experienced team

Customer oriented and flexible

in platform & component development of special technology topics

Cooperation based on partnership

in the long-term project implementation

FAQ

High-precision vacuum deposition equipment, custom engineering, manufacturing, commissioning, and lifecycle service for wafer and panel applications. 

Magnetron sputtering, electron-beam evaporation, thermal evaporation, laser-arc evaporation, and related pretreatment and in-process measurement systems. 

Yes. We tailor platforms and components to specific materials, throughput, and line-integration needs, using a configure-to-order model to accelerate time to value. 

Advanced packaging, MEMS, and PiezoMEMS today, with broader coverage across front-end and back-end semiconductor use cases.

Applications
Electronic component on printed circuit board
Advanced PackagingVacuum Deposition Equipment for Wafer or Panel-Level SubstratesLearn more
MEMS element on luminous background
MEMSVacuum Deposition Equipment & Solutions for MEMS ManufacturingLearn more
PiezoMEMSAdvanced Vacuum Deposition Equipment for MetallizationLearn more
CLEANROOM
VA CLEANROOM
Sampling & Assembly Facility

for precision optics, photonics & semiconductor application

Learn more
  • Production of vacuum coating systems for precision optics, photonic systems and semiconductor applications 
  • Sampling & Pilot Deposition Services 
  • 600 qm Semiconductor Cleanroom including AMC capability 
Support

Engineering
Simulation . Sampling . Layout

Learn more
Perspective view of a VON ARDENNE sampling and testing equipment.

Technology & Application Center
Sampling . Development . Scaling

Learn more

Service
Customer Portal . Spare Parts . Trainings

Learn more
Media
No news available.
CONTACT
02.09.2026 - 04.09.2026
Semicon Taiwan 2026

Taipeh, Taiwan

Silicon Saxony Pavilion

Search