VERA

Evaporation System

VERA systems are compact, calotte‑based PVD batch coater platforms designed for maximum versatility. They support a wide variety of evaporation methods — thermal and electron‑beam — as well as ion‑beam and plasma‑assisted deposition.

The platform is built for flexibility: it handles diverse substrate formats, complex multilayer stacks, and multiple deposition technologies. VERA can operate as a standalone cleanroom tool or be wall‑integrated with automated handling for continuous, production‑grade workflows.

Extensive configuration options let each system be tailored to specific customer needs, making VERA suitable for optics, electronics, and semiconductor applications. Universal substrate compatibility is provided via segmented domes, pallet carriers, or planetary carriers.

Offered in four chamber sizes, the VERA portfolio covers R&D through high‑volume manufacturing. Integrated optical monitoring delivers precise process control and consistent, high‑quality coatings.