VICA
Vertical Coating System

The VICA900 system platform, part of the VICA product family, sets new benchmarks for process and coating versatility. Designed for medium to high throughput, it is consistently optimized to deliver market‑leading total cost of ownership.

Its modular and highly flexible architecture allows precise configuration to individual production needs. Notable features include options for vertical and double‑sided coating, as well as a versatile carrier concept that supports a wide range of substrate sizes and materials.

The platform offers extensive process flexibility, supporting both sputtering and evaporation technologies along with various pre‑ and post‑treatment methods. With the integration of HCLA technology, the VICA900 introduces a true innovation—bringing this process into an inline system for the first time.

In addition, the VICA900 features predefined and standardized interfaces for automation solutions, enabling efficient loading and unloading within fully integrated production environments.

Would you like to learn more? Explore the content below or contact us.

Scalable and flexible

through modular design

Unrivaled selection of PVD processes

thanks to diverse technology components

Wide substrate variety

enabled by a flexible carrier concept

VICA900 Mid Volume
  • Basic system for medium throughput
  • Combinations of pretreatment, magnetron sputtering, and HCLA for double-sided coating
  • Compact installation space and modular expandability
VICA900 High Volume
  • Production system with a focus on high throughput and market-leading total cost of ownership
  • Combinations of pretreatment, magnetron sputtering, and HCLA for double-sided coating
  • Modularity for various processes and applications
Support
Media
First PVD tool for PEM Electrolysis

The first pro­duction coating system for full-size PEM electro­lyzer com­po­nents is about to be in­stalled.

CONTACT
07.04.2026 - 10.04.2026
China Glass 2026

Shanghai, China

Shanghai New International Expo Center

N1 / 181

07.05.2026 - 09.05.2026
TiExpo 2026

Shanghai, China

National Exhibition and Convention Center

A006

05.07.2026 - 10.07.2026
SPIE Astronomical Telescopes + Instrumentation 2026

Copenhagen, Denmark

02.09.2026 - 04.09.2026
Semicon Taiwan 2026

Taipeh, Taiwan

Silicon Saxony Pavilion

13.10.2026 - 15.10.2026
Semicon West 2026

San Francisco, CA, USA

Moscone Center

North Hall | Booth 5373

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