Wafer-Level Optics
Coating Equipment for Precision Optical Components

Optical filter layers deposited directly on glass or semiconductor wafers make it possible to create extremely compact optical products with strong price‑performance advantages. As a result, they are now widely used in markets such as consumer electronics and the automotive industry. With rising demand for high‑volume manufacturing, wafer‑level optics are increasingly moving into the spotlight.

The OPTA X is designed specifically for these needs in photonics and wafer‑level optics.

For multilayer coatings on wafer‑based microlens arrays, semiconductor sensors, or filter‑on‑chip CMOS devices, the OPTA X offers fully automated, SEMI‑compatible wafer handling for seamless integration into semiconductor fabs. It supports 200‑millimeter wafers and is also suitable for wafer sizes up to 300 millimeters.

Would you like to learn more? Explore the content below or contact us.

Optics brochure

Optical filter layers directly on glass and semiconductor wafers

e.g. for silicon devices

Optical monitoring of transmission or reflection

directly on the wafer

SEMI-compatible wafer handling

for integration in semiconductor fabs

Narrow-Band Filter
Coating Example

CLEANROOM

Production of vacuum coating systems for precision optics, photonic systems and semiconductor applications
Sampling & Pilot Deposition Services
600 qm Semiconductor Cleanroom including AMC capability

Support