PiezoMEMS

Advanced Vacuum Deposition Equipment for Metallization

Piezoelectric micro‑electro‑mechanical systems (piezoMEMS) power the miniature sensors that make smartphones, smartwatches, and other connected devices responsive, intuitive, and energy‑efficient. With their ultra‑low power consumption and high sensitivity, piezoMEMS are a key enabler of next‑generation wearables, IoT devices, and smart‑living technologies.

The OPTA X platform delivers ultra‑precise deposition of high‑performance piezoelectric materials such as AlN and AlScN. These materials are ideal for piezoMEMS thanks to their excellent mechanical properties, CMOS compatibility, and long‑term stability. The resulting thin films enable highly sensitive sensors and actuators by converting mechanical forces and displacements into electrical signals—and back again—with exceptional efficiency.

Drawing on decades of materials‑science and deposition expertise, VON ARDENNE supports the growing piezoMEMS market with processes engineered for outstanding uniformity in thickness and stoichiometry. The OPTA X ensures consistent performance across 200‑mm and 300‑mm wafers, maximizing throughput and yield in high‑volume production environments.